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The high speed miniature tera- and gigahertz electromagnetic radiation on-chip spectrometer that comprises a tunable solid state 2D charge carrier layer or a quasi 2D charge carrier layer with incorporated single or multiple defects, at least first and second contacts to the charge carrier layer. The device also includes an apparatus for measuring the device response between the first and second contacts, and an apparatus for controllable tuning of at least one of the charge carrier layer parameters. Tera patch progress 100 complete. The operation principle is based on the fact that radiation of different wavelengths excites distinct sets of plasma modes in the charge carrier layer.

  • In addition they have a complete on-line resource where you can download the package and read tutorials
  • U.S. Environmental Protection Agency
  • The team is constantly working on improving the sensitivity of TeraSense terahertz detectors
  • Teva Pharmaceutical Industries Ltd
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Current development rates of terahertz imaging and detection systems suggest that within a mid-term perspective (2021 – 2021) THz systems will be successfully integrated into the majority of production lines and process cycles. By various estimates at this stage the market size of terahertz devices is expected to reach (7–9) B$ per year.

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Terasense imaging chip production consists of several lithographic steps conducted in special clean room conditions of TeraSense semiconductor fab. A clean room is an environment that has a low level of environmental pollutants such as dust, airborne microbes and chemical vapors. It also has a controlled level of contamination that is specified by the number of size-defined particles per cubic meter. TeraSense facilities have class 1000 (ISO 6) cleanroom conditions in the walking area and 100 (ISO 5) conditions under the equipment.


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We plan to switch from expensive GaAs technology to a widespread and cheap Si technology. This step will enable us to integrate THz detection and amplification circuits on the same chip. The latter will increase the number of pixels and simplify production of TeraSense chips and devices.


For patterning of GaAs wafers TeraSense has a special production line. The supporting infrastructure consists of a water purification system, a pure gas installation, a photo-resist spinner, a wet bench, an UV-exposure system, a metal deposition system, an inspection microscope, a photo-resist ashing system, and an ion etching system. Electron beam lithography is used to achieve and inspect structures at sizes below one micrometer. Electron beam lithography uses a finely focused electron beam for exposure of resist material.

Unfortunately, standard two-dimensional (2D) plasmons are observable only when their frequency ω >1/τ, where the momentum relaxation time τ essentially decreases with increasing temperature. Hence, the plasmonic effects are visible only at sufficiently large frequencies and sufficiently low temperatures.

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